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Extraction of physical parameters of alternative high-k gate stacks through comparison between measurements and quantum simulations
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Authors
Campera, A.
;
Iannaccone, G.
;
Crupi, F.
;
Groeseneken, Guido
Conference
6th European Conference on Ultimate Integration of Silicon - ULIS
Title
Extraction of physical parameters of alternative high-k gate stacks through comparison between measurements and quantum simulations
Publication type
Proceedings paper
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