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Direct plasma hydrogenation and SiN:H hydrogenation of thin-film polycrystalline-silicon solar cells

dc.contributor.authorCarnel, Lodewijk
dc.contributor.authorGordon, Ivan
dc.contributor.authorDekkers, Harold
dc.contributor.authorVan Gestel, Dries
dc.contributor.authorVan Nieuwenhuysen, Kris
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-16T00:53:33Z
dc.date.available2021-10-16T00:53:33Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10187
dc.sourceIIOimport
dc.titleDirect plasma hydrogenation and SiN:H hydrogenation of thin-film polycrystalline-silicon solar cells
dc.typeProceedings paper
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewno
dc.source.beginpage907
dc.source.endpage908
dc.source.conferenceTechnical Digest 15th International Photovoltaic Science and Engineering Conference
dc.source.conferencedate10/10/2005
dc.source.conferencelocationShanghai China
imec.availabilityPublished - imec


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