Authors

Carnel, Lodewijk; Gordon, Ivan; Van Nieuwenhuysen, Kris; Van Gestel, Dries; Beaucarne, Guy; Poortmans, Jef

Issue

1_2

Journal

Thin Solid Films

Volume

487

Title

Defect passivation in chemical vapour deposited fine-grained polycrystalline silicon by plasma hydrogenation

Publication type

Journal article