Authors

Caymax, Matty; Delhougne, Romain; Loo, Roger; Eneman, Geert; Verheyen, Peter; Ries, Michael; Luysberg, Martina

Conference

Institute of Thin Films and Interfaces

Title

Thin SiGe strain-relaxed buffer layers: relaxation mechanism and integration in strained Si MOS-FETs

Publication type

Oral presentation