Thin SiGe strain-relaxed buffer layers: carbon-induced relaxation

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Authors
Caymax, Matty; Delhougne, Romain; Loo, Roger; Ries, Michael; Luysberg, Martina
Conference
ICSI-4, 4th International Conference on Silicon Epitaxy and Heterostructures
Title
Thin SiGe strain-relaxed buffer layers: carbon-induced relaxation
Publication type
Proceedings paper
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