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Electrical and physical characterization of MOSFETs with MBE grown La2HfO7 and HfO2 high-k dielectrics integrated in a conventional flow
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Authors
Conard, Thierry
;
Pantisano, Luigi
;
Claes, Martine
;
Demand, Marc
;
Deweerd, Wim
;
De Gendt, Stefan
;
Houssa, Michel
;
Lujan, Guilherme
;
Ragnarsson, Lars-Ake
;
Rohr, Erika
;
Schram, Tom
;
Hooker, Jacob
;
Rittersma, Chris
;
Fompeyrinne, J.
;
Loquet, J.P.
Conference
Workshop "Nouveaux Oxides à Forte Permittivité dans l'Intégration des Semiconducteurs"
Title
Electrical and physical characterization of MOSFETs with MBE grown La2HfO7 and HfO2 high-k dielectrics integrated in a conventional flow
Publication type
Oral presentation
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