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Positive bias temperature instability in nMOSFETs with ultra-thin Hf-silicate gate dielectrics
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Authors
Crupi, Felice
;
Pace, C.
;
Cocorullo, G.
;
Groeseneken, Guido
;
Aoulaiche, Marc
;
Houssa, Michel
Journal
Microelectronic Engineering
Volume
80
Title
Positive bias temperature instability in nMOSFETs with ultra-thin Hf-silicate gate dielectrics
Publication type
Journal article
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