Publication:

The influence of gas damping on the harmonic and transient response of MEMS devices

Date

2005

Proceedings Paper

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Author(s)

De Coster, Jeroen

;

Tilmans, Harrie

;

Steeneken, P.G.

;

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1840 since deposited on 2021-10-16

Acq. date: 2026-02-25