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The influence of gas damping on the harmonic and transient response of MEMS devices

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorTilmans, Harrie
dc.contributor.authorSteeneken, P.G.
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-16T01:06:51Z
dc.date.available2021-10-16T01:06:51Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10292
dc.sourceIIOimport
dc.titleThe influence of gas damping on the harmonic and transient response of MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage300
dc.source.endpage303
dc.source.conference16th MicroMechanics Europe Workshop - MME
dc.source.conferencedate4/09/2005
dc.source.conferencelocationGoteborg Sweden
imec.availabilityPublished - imec


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