Authors

De Jaeger, Brice; Bonzom, Renaud; Leys, Frederik; Richard, Olivier; Van Steenbergen, Jan; Winderickx, Gillis; Van Moorhem, Els; Raskin, G.; Letertre, F.; Billon, T.; Meuris, Marc; Heyns, Marc

Journal

Microelectronic Engineering

Volume

80

Title

Optimisation of a thin epitaxial Si layer as Ge passivation layer to demonstrate deep sub-micron n- and p-FETs on Ge-On-Insulator substrates

Publication type

Journal article