Publication:

Atomic layer deposition of hafnium oxide on germanium substrates

Date

2005

Journal article

Simple item page Full metadata Statistics

Author(s)

Delabie, Annelies

;

;

;

;

Conard, Thierry

;

;

Richard, Olivier

;

Vandervorst, Wilfried

;

;

;

;

Viitanan, Minna M.

;

Brongersma, Hidde H.

;

;

;

Garfunkel, Eric

;

Gustafsson, Torgny

;

Journal

J. Applied Physics

Statistics

2004 since deposited on 2021-10-16

1last month

Acq. date: 2026-05-18