Publication:

Atomic layer deposition of hafnium oxide on germanium substrates

Date

2005

Journal article

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Author(s)

Delabie, Annelies

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Conard, Thierry

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Richard, Olivier

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Vandervorst, Wilfried

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Heyns, Marc

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Meuris, Marc

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Viitanan, Minna M.

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Brongersma, Hidde H.

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Garfunkel, Eric

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Gustafsson, Torgny

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Journal

J. Applied Physics

Statistics

2008 since deposited on 2021-10-16

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Acq. date: 2026-10-08