Improvement of ohmic contacts on AlGaN/GaN HEMT's by using in-situ Si3N4 passivation layer

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Authors
Derluyn, Joff; Van Daele, Benny; Boeykens, Steven; Cheng, Kai; Ruythooren, Wouter; Leys, Maarten; Germain, Marianne; Van Tendeloo, Gustaaf; Borghs, Gustaaf
Conference
11th European Workshop on MOVPE
Title
Improvement of ohmic contacts on AlGaN/GaN HEMT's by using in-situ Si3N4 passivation layer
Publication type
Proceedings paper
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