Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey
Publication:
Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey
Date
2005-01
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Deweerd, Wim
;
Kaushik, Vidya
;
Chen, J.
;
Shimamoto, Y.
;
Schram, Tom
;
Ragnarsson, Lars-Ake
;
Delabie, Annelies
;
Pantisano, Luigi
;
Eyckens, Brenda
;
Maes, J.W.
;
De Gendt, Stefan
;
Heyns, Marc
Journal
Microelectronics Reliability
Abstract
Description
Metrics
Views
1933
since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations
Metrics
Views
1933
since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations