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Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions
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Authors
Dixit, Abhisek
;
Rooyackers, Rita
;
Leys, Frederik
;
Kaiser, Monja
;
Weemaes, R.
;
Ferain, Isabelle
;
De Keersgieter, An
;
Collaert, Nadine
;
Surdeanu, Radu
;
Goodwin, Michael
;
Zimmerman, Paul
;
Loo, Roger
;
Caymax, Matty
;
Jurczak, Gosia
;
Biesemans, Serge
;
De Meyer, Kristin
Editors
Kottantharayil, Anil
Conference
Proceedings of the 35th European Solid-State Device Research Conference - ESSDERC
Title
Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions
Publication type
Proceedings paper
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