Authors

Dixit, Abhisek; Rooyackers, Rita; Leys, Frederik; Kaiser, Monja; Weemaes, R.; Ferain, Isabelle; De Keersgieter, An; Collaert, Nadine; Surdeanu, Radu; Goodwin, Michael; Zimmerman, Paul; Loo, Roger; Caymax, Matty; Jurczak, Gosia; Biesemans, Serge; De Meyer, Kristin

Editors

Kottantharayil, Anil

Conference

Proceedings of the 35th European Solid-State Device Research Conference - ESSDERC

Title

Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions

Publication type

Proceedings paper