Publication:

Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions

Date

2005

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Rooyackers, Rita

;

;

;

;

Ferain, Isabelle

;

De Keersgieter, An

;

Collaert, Nadine

;

;

Goodwin, Michael

;

Zimmerman, Paul

;

;

;

;

Biesemans, Serge

;

De Meyer, Kristin

Statistics

1897 since deposited on 2021-10-16

Acq. date: 2026-03-17