In situ observation of compound formation and ion beam mixing

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Authors
De Coster, Walter; Brijs, Bert; Elst, Kathy; Vandervorst, Wilfried
Conference
Secondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference
Title
In situ observation of compound formation and ion beam mixing
Publication type
Proceedings paper
Embargo date
9999-12-31
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