Authors

Eneman, Geert; Simoen, Eddy; Delhougne, Romain; Verheyen, Peter; Simons, Veerle; Loo, Roger; Caymax, Matty; De Meyer, Kristin; Vandervorst, Wilfried; Claeys, Cor

Conference

ULSI Process Integration IV

Title

P+/N junction formation in thin strain relaxed buffer strained silicon substrates: the effect of the junction anneal

Publication type

Proceedings paper