Authors

Eyben, Pierre; De Keersgieter, An; Chramtsov, I.; Fouchier, M.; Janssens, Tom; Vandervorst, Wilfried

Conference

Proceedings of the 8th Int. Workshop on the Fabrication , Characterization and Modeling of Ultra Shallow Junctions in Semicond.

Title

Characterization and otimalization of 65nm CMOS technology using scanning spreading resistance microscopy

Publication type

Meeting abstract