Authors

Eyckens, Brenda; Collaert, Nadine; Schaekers, Marc; Sleeckx, Erik; Eneman, Geert; Verheyen, Peter; Rooyackers, Rita

Conference

8th Technical and Scientific Meeting of CREMSI 8th Technical and Scientific Meeting of CREMSI

Title

Process optimization of low temperature silicon nitride stressor layers for improvement of device performance for 45nm technology and below

Publication type

Oral presentation