Publication:

Ultra shallow junctions formed by sub-melt laser annealing

Date

2005
Proceedings Paper
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Author(s)

Falepin, Annelies  
;
Janssens, Tom
;
Severi, Simone  
;
Vandervorst, Wilfried  
;
Felch, S.B.
;
Parihar, V.
;
Mayur, A.

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2010 since deposited on 2021-10-16
Acq. date: 2026-05-19

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2010 since deposited on 2021-10-16
Acq. date: 2026-05-19

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