Ultra shallow junctions formed by sub-melt laser annealing

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Authors
Falepin, Annelies; Janssens, Tom; Severi, Simone; Vandervorst, Wilfried; Felch, S.B.; Parihar, V.; Mayur, A.
Conference
13th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP
Title
Ultra shallow junctions formed by sub-melt laser annealing
Publication type
Proceedings paper
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