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The importance of dynamic contact angles in immersion lithography and how to measure them

dc.contributor.authorFyen, Wim
dc.contributor.authorWells, Gregg
dc.contributor.authorKocsis, Michael
dc.contributor.authorKim, H-W
dc.contributor.authorMaenhoudt, Mireille
dc.date.accessioned2021-10-16T01:38:23Z
dc.date.available2021-10-16T01:38:23Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10472
dc.sourceIIOimport
dc.titleThe importance of dynamic contact angles in immersion lithography and how to measure them
dc.typeOral presentation
dc.contributor.imecauthorKocsis, Michael
dc.source.peerreviewno
dc.source.conference2nd International Symposium on Immersion Lithography
dc.source.conferencedate12/09/2005
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec


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