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Surface stabilization for higher performance AlGaN/GaN HEMT with in-situ MOVPE SiN

dc.contributor.authorGermain, Marianne
dc.contributor.authorLeys, Maarten
dc.contributor.authorDerluyn, Joff
dc.contributor.authorBoeykens, Steven
dc.contributor.authorDegroote, Stefan
dc.contributor.authorRuythooren, Wouter
dc.contributor.authorDas, Johan
dc.contributor.authorVandersmissen, Raf
dc.contributor.authorXiao, Dongping
dc.contributor.authorWang, Wenfei
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-16T01:43:37Z
dc.date.available2021-10-16T01:43:37Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10497
dc.sourceIIOimport
dc.titleSurface stabilization for higher performance AlGaN/GaN HEMT with in-situ MOVPE SiN
dc.typeProceedings paper
dc.contributor.imecauthorRuythooren, Wouter
dc.contributor.imecauthorWang, Wenfei
dc.contributor.imecauthorBorghs, Gustaaf
dc.source.peerreviewno
dc.source.beginpageE6.7
dc.source.conferenceGaN, AlN, InN and Their Alloys
dc.source.conferencedate28/11/2004
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol. 831


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