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Deposition of 60nm thin Sr0.8Bi2.2Ta2O9 layers for application in scaled 1T1C and 1T FeRAM devices
Publication:
Deposition of 60nm thin Sr0.8Bi2.2Ta2O9 layers for application in scaled 1T1C and 1T FeRAM devices
Date
2005-06
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Goux, Ludovic
;
Xu, Zhen
;
Kaczer, Ben
;
Groeseneken, Guido
;
Wouters, Dirk
Journal
Microelectronic Engineering
Abstract
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1855
since deposited on 2021-10-16
414
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Acq. date: 2025-10-24
Citations
Metrics
Views
1855
since deposited on 2021-10-16
414
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations