Authors

Goux, Ludovic; Xu, Zhen; Kaczer, Ben; Groeseneken, Guido; Wouters, Dirk

Journal

Microelectronic Engineering

Volume

80C

Title

Deposition of 60nm thin Sr0.8Bi2.2Ta2O9 layers for application in scaled 1T1C and 1T FeRAM devices

Publication type

Journal article