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Morphologies and growth modes of FeSi and beta-FeSi2 layers prepared by rapid thermal annealing
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Authors
Amesz, Peter Henk
;
Jorgensen, L. V.
;
Libezny, Milan
;
Poortmans, Jef
;
Nijs, Johan
;
van Veen, A.
;
Schut, H.
;
de Hosson, J. T. M.
Conference
Silicide Thin Films - Fabrication, Properties, and Applications
Title
Morphologies and growth modes of FeSi and beta-FeSi2 layers prepared by rapid thermal annealing
Publication type
Proceedings paper
Embargo date
9999-12-31
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