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Metal analysis methodology for novel materials in IC manufacturing

dc.contributor.authorHellin, David
dc.contributor.authorRip, Jens
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorMertens, Paul
dc.contributor.authorVinckier, Chris
dc.date.accessioned2021-10-16T01:58:35Z
dc.date.available2021-10-16T01:58:35Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10565
dc.sourceIIOimport
dc.titleMetal analysis methodology for novel materials in IC manufacturing
dc.typeProceedings paper
dc.contributor.imecauthorHellin, David
dc.contributor.imecauthorRip, Jens
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceISSM Workshop 2 - Manufacturing Impact From Introducing New Materials in Production
dc.source.conferencedate13/09/2005
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


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