Publication:

NMOS and PMOS triple gate devices with mid-gap metal gate on oxynitride and Hf based gate dielectrics

Date

2005
Proceedings Paper
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Author(s)

Henson, Kirklen
;
Collaert, Nadine  
;
Demand, Marc  
;
Goodwin, Michael
;
Brus, Stephan  
;
Rooyackers, Rita
;
Van Ammel, Annemie  
;
Degroote, Bart
;
Ercken, Monique  
;
Baerts, Christina  
;
Kottantharayil, Anil
;
Dixit, Abhisek
;
Beckx, Stephan  
;
Schram, Tom  
;
Deweerd, Wim
;
Boullart, Werner  
;
Schaekers, Marc  
;
De Gendt, Stefan  
;
De Meyer, Kristin  
;
Yim, Yong Sik
;
Hooker, Jacob
;
Jurczak, Gosia  
;
Biesemans, Serge  

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1998 since deposited on 2021-10-16
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