Authors

Armigliato, A.; Balboni, R.; Benedetti, A.; Frabboni, S.; Tixier, A.; Vanhellemont, Jan

Conference

International Conference on Extended Defects in Semiconductors (EDS '96); 8-12 September 1996; Giens, France.

Title

Strain measurements in thin film structures by convergent beam electron diffraction

Publication type

Oral presentation