Strain measurements in thin film structures by convergent beam electron diffraction
| dc.contributor.author | Armigliato, A. | |
| dc.contributor.author | Balboni, R. | |
| dc.contributor.author | Benedetti, A. | |
| dc.contributor.author | Frabboni, S. | |
| dc.contributor.author | Tixier, A. | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.date.accessioned | 2021-09-29T14:16:04Z | |
| dc.date.available | 2021-09-29T14:16:04Z | |
| dc.date.issued | 1996 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1059 | |
| dc.source | IIOimport | |
| dc.title | Strain measurements in thin film structures by convergent beam electron diffraction | |
| dc.type | Oral presentation | |
| dc.source.peerreview | no | |
| dc.source.conference | International Conference on Extended Defects in Semiconductors (EDS '96); 8-12 September 1996; Giens, France. | |
| dc.source.conferencelocation | ||
| imec.availability | Published - imec |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
|
There are no files associated with this item. |
|||