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H2/D2 isotopic effect on negative bias temperature instabilities in SiOx/HfSiON/TaN gate stacks

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1987 since deposited on 2021-10-16
1last month
Acq. date: 2026-02-25

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1987 since deposited on 2021-10-16
1last month
Acq. date: 2026-02-25

Citations