Publication:
Defect generation in high-k gate dielectric stacks under electrical stress: the impact of hydrogen
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1854 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-06
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Metrics
Views
1854 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-06
Citations