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Defect generation in high-k gate dielectric stacks under electrical stress: the impact of hydrogen
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Authors
Houssa, Michel
;
Pourtois, Geoffrey
;
Stesmans, Andre
;
Heyns, Marc
Issue
21
Journal
Journal of Physics: Condensed Matter
Volume
17
Title
Defect generation in high-k gate dielectric stacks under electrical stress: the impact of hydrogen
Publication type
Journal article
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