Authors

Huang, Y.L.; Job, R.; Simoen, Eddy; Claeys, Cor; Ma, Y.; Dungen, W.; Fahrner, W.R.; Versluijs, Janko; Clauws, P.

Conference

Semiconductor Defect Engineering - Materials, Synthetic Structures, and Devices

Title

P-N junction diode fabricated based on donor formation in plasma hydrogenated P-type czochralski silicon

Publication type

Proceedings paper