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Untersuchung der Anreicherung von Germanium in heliumimplantierten SiGe/Si-Heterostrukturen durch Oxidation

dc.contributor.authorHueging, N.
dc.contributor.authorLuysberg, M.
dc.contributor.authorBuca, D.
dc.contributor.authorHollander, B.
dc.contributor.authorMantl, S.
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.authorUrban, K.
dc.date.accessioned2021-10-16T02:12:58Z
dc.date.available2021-10-16T02:12:58Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10622
dc.sourceIIOimport
dc.titleUntersuchung der Anreicherung von Germanium in heliumimplantierten SiGe/Si-Heterostrukturen durch Oxidation
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conferenceFr|hjahrstagung der Deutschen Physischen Gesellschaft
dc.source.conferencedate4/03/2005
dc.source.conferencelocationBerlin Germany
imec.availabilityPublished - imec


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