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Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics

dc.contributor.authorIacopi, Francesca
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorMazurenko, Alexander
dc.contributor.authorStruyf, Herbert
dc.contributor.authorMannaert, Geert
dc.contributor.authorTravaly, Youssef
dc.contributor.authorMaznev, Alexey
dc.contributor.authorAbell, Thomas
dc.contributor.authorTower, Joshua
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T02:14:27Z
dc.date.available2021-10-16T02:14:27Z
dc.date.issued2005-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10628
dc.sourceIIOimport
dc.titleSurface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics
dc.typeProceedings paper
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.source.peerreviewyes
dc.source.beginpage217
dc.source.endpage219
dc.source.conferenceProceedings IEEE International Interconnects Technology Conference - IITC
dc.source.conferencedate6/06/2005
dc.source.conferencelocationSan francisco, CA USA
imec.availabilityPublished - imec


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