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UV-assisted curing: an effective technique for toughening of low-k organosilicate films

dc.contributor.authorIacopi, Francesca
dc.contributor.authorWaldfried, Carlo
dc.contributor.authorHouthoofd, Kristof
dc.contributor.authorGuyer, Eric
dc.contributor.authorGage, David
dc.contributor.authorCarlotti, Giovanni
dc.contributor.authorTravaly, Youssef
dc.contributor.authorAbell, Thomas
dc.contributor.authorEscorcia, Orlando
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBerry, Ivan
dc.contributor.authorDauskardt, Reinhold
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T02:15:21Z
dc.date.available2021-10-16T02:15:21Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10631
dc.sourceIIOimport
dc.titleUV-assisted curing: an effective technique for toughening of low-k organosilicate films
dc.typeOral presentation
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference
dc.source.conferencedate27/09/2005
dc.source.conferencelocationColorado Springs, CO USA
imec.availabilityPublished - imec


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