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Poly encapsulated LOCOS lateral isolation for 0.25 µm CMOS

dc.contributor.authorBadenes, Gonçal
dc.contributor.authorRooyackers, Rita
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-09-29T14:16:11Z
dc.date.available2021-09-29T14:16:11Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1064
dc.sourceIIOimport
dc.titlePoly encapsulated LOCOS lateral isolation for 0.25 µm CMOS
dc.typeProceedings paper
dc.contributor.imecauthorDeferm, Ludo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage193
dc.source.endpage196
dc.source.conferenceProceedings of the 26th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate9/09/1996
dc.source.conferencelocationBologna Italy
imec.availabilityPublished - open access


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