A dedicated loading instrument for characterization and testing of MEMS

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Authors
Kalicinski, Stanislaw; Sabuncuoglu Tezcan, Deniz; De Moor, Piet; De Vries, Atze-Cees; Van Hoof, Chris; Wevers, Martine; De Wolf, Ingrid
Conference
Microsystem Technologies
Title
A dedicated loading instrument for characterization and testing of MEMS
Publication type
Proceedings paper
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