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A dedicated loading instrument for characterization and testing of MEMS

dc.contributor.authorKalicinski, Stanislaw
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorDe Moor, Piet
dc.contributor.authorDe Vries, Atze-Cees
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorWevers, Martine
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T02:26:11Z
dc.date.available2021-10-16T02:26:11Z
dc.date.issued2005-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10674
dc.sourceIIOimport
dc.titleA dedicated loading instrument for characterization and testing of MEMS
dc.typeProceedings paper
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage538
dc.source.endpage545
dc.source.conferenceMicrosystem Technologies
dc.source.conferencedate5/08/2005
dc.source.conferencelocationPoing Germany
imec.availabilityPublished - imec


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