Trap generation and progressive wearout in thin HfSiON

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Authors
Kauerauf, Thomas; Degraeve, Robin; Crupi, Felice; Kaczer, Ben; Groeseneken, Guido; Maes, Herman
Conference
43rd Annual IEEE International Relibability Physics Symposium Proceedings
Title
Trap generation and progressive wearout in thin HfSiON
Publication type
Proceedings paper
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