Authors

Kaushik, Vidya; Rohr, Erika; Hyun, S.; De Gendt, Stefan; Van Elshocht, Sven; Delabie, Annelies; Everaert, Jean-Luc; Veloso, Anabela; Brus, Stephan; Ragnarsson, Lars-Ake; Richard, Olivier; Caymax, Matty; Heyns, Marc

Conference

Physics and Technology if High-k Gate Dielectrics III

Title

Threshold voltage control in PMOSFETs with polysilicon or fully-Silicided gates on Hf-based gate dielectric using controlled lateral oxidation

Publication type

Proceedings paper