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Ni fully silicided gates for 45 nm CMOS applications
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Authors
Kittl, Jorge
;
Lauwers, Anne
;
Kmieciak, Malgorzata
;
Van Dal, Mark
;
Veloso, Anabela
;
Kottantharayil, Anil
;
Pourtois, Geoffrey
;
Demeurisse, Caroline
;
Schram, Tom
;
Brijs, Bert
;
de Potter de ten Broeck, Muriel
;
Vrancken, Christa
;
Maex, Karen
Issue
82
Journal
Microelectronic Engineering
Title
Ni fully silicided gates for 45 nm CMOS applications
Publication type
Journal article
Embargo date
9999-12-31
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