Publication:

Scalability of Ni FUSI gate processes: phase and Vt control to 30 nm gate lengths

Date

2005

Proceedings Paper

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Author(s)

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Veloso, Anabela

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;

Kottantharayil, Anil

;

Demeurisse, Caroline

;

Kubicek, Stefan

;

;

;

Richard, Olivier

;

Kmieciak, Malgorzata

;

;

Vrancken, Christa

;

Chiarella, Thomas

;

;

;

Biesemans, Serge

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Acq. date: 2026-04-06