Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
High-k dielectrics integration prospects
View/
open
10419.pdf (1.202Mb)
Metadata
Show full item record
Authors
Kubicek, Stefan
;
Van Elshocht, Sven
;
Delabie, Annelies
;
Yamamoto, Kazuhiko
;
Beckx, Stephan
;
Claes, Martine
;
Van Hoornick, Nausikaa
;
Kwak, Dong Hwa
;
Hyun, Sangjin
;
Rothschild, Aude
;
Veloso, Anabela
;
Kottantharayil, Anil
;
Lujan, Guilherme
;
Kittl, Jorge
;
Lauwers, Anne
;
Kaushik, Vidya
;
Niwa, Masaaki
;
De Gendt, Stefan
;
Heyns, Marc
;
Jurczak, Gosia
;
Biesemans, Serge
Conference
ULSI Process Integration IV
Title
High-k dielectrics integration prospects
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login
