Authors

Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Storm, Wolfgang; Vandervorst, Wilfried; Maex, Karen

Conference

Materials Research Society Fall Meeting: Symposium Cb: Thin Films. Surface and Morphology; December 2-6, 1996; Boston, USA.

Title

Protective films formed during the etching of TiSi2 and CoSi2 in F-based plasmas

Publication type

Oral presentation