Silicides for advanced CMOS devices

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Authors
Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; Chamirian, Oxana; Kmieciak, Malgorzata; Torregiani, Cristina; Liu, J.; Benedetti, Alessandro; Richard, Olivier; Bender, Hugo; van Berkum, J.G.M.; Kaiser, M.; Veloso, Anabela; Kottantharayil, Anil; de Potter de ten Broeck, Muriel; Maex, Karen
Conference
Microscopy of Semiconducting Materials. Proceedings of the 14th Conference
Title
Silicides for advanced CMOS devices
Publication type
Proceedings paper
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