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Restoration of surface and bulk properties of ash plasma-treated porous low-k dielectrics

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorBoullart, Werner
dc.contributor.authorKesters, Els
dc.contributor.authorVan Puymbroeck, Jan
dc.contributor.authorVanhaelemeersch, Serge
dc.date.accessioned2021-10-16T02:49:22Z
dc.date.available2021-10-16T02:49:22Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10759
dc.sourceIIOimport
dc.titleRestoration of surface and bulk properties of ash plasma-treated porous low-k dielectrics
dc.typeOral presentation
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorVan Puymbroeck, Jan
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.conferenceEuropean Congress on Advanced Materials and Processes - Euromat
dc.source.conferencedate5/09/2005
dc.source.conferencelocationPrague Czech republic
imec.availabilityPublished - imec


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