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Restoration of surface and bulk properties of ash plasma-treated porous low-k dielectrics
Publication:
Restoration of surface and bulk properties of ash plasma-treated porous low-k dielectrics
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Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Le, Quoc Toan
;
Struyf, Herbert
;
Baklanov, Mikhaïl
;
Boullart, Werner
;
Kesters, Els
;
Van Puymbroeck, Jan
;
Vanhaelemeersch, Serge
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1948
since deposited on 2021-10-16
1
last month
Acq. date: 2026-01-09
Citations
Metrics
Views
1948
since deposited on 2021-10-16
1
last month
Acq. date: 2026-01-09
Citations