Publication:

Restoration of surface and bulk properties of ash plasma-treated porous low-k dielectrics

Date

2005
Presentation
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dc.contributor.authorLe, Quoc Toan
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorBoullart, Werner
dc.contributor.authorKesters, Els
dc.contributor.authorVan Puymbroeck, Jan
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorVan Puymbroeck, Jan
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.date.accessioned2021-10-16T02:49:22Z
dc.date.available2021-10-16T02:49:22Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10759
dc.source.conferenceEuropean Congress on Advanced Materials and Processes - Euromat
dc.source.conferencedate5/09/2005
dc.source.conferencelocationPrague Czech republic
dc.title

Restoration of surface and bulk properties of ash plasma-treated porous low-k dielectrics

dc.typeOral presentation
dspace.entity.typePublication
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