Publication:

Restoration of surface and bulk properties of ash plasma-treated porous low-k dielectrics

Date

2005

Presentation

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Author(s)

;

Struyf, Herbert

;

Baklanov, Mikhaïl

;

Boullart, Werner

;

;

Van Puymbroeck, Jan

;

Vanhaelemeersch, Serge

Statistics

1950 since deposited on 2021-10-16

Acq. date: 2026-03-16