dc.contributor.author | Locquet, Jean-Pierre | |
dc.contributor.author | Marchiori, Chiara | |
dc.contributor.author | Sousa, M. | |
dc.contributor.author | Siegwart, H. | |
dc.contributor.author | Caimi, D. | |
dc.contributor.author | Fompeyrine, Jean | |
dc.contributor.author | Pantisano, Luigi | |
dc.contributor.author | Claes, Martine | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Demand, Marc | |
dc.contributor.author | Deweerd, Wim | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Houssa, Michel | |
dc.contributor.author | Aoulaiche, Marc | |
dc.contributor.author | Lujan, Guilherme | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Rohr, Erika | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Hooker, Jacob | |
dc.contributor.author | Rittersma, Chris | |
dc.contributor.author | Furukawa, Yukiko | |
dc.contributor.author | Seo, J.W. | |
dc.contributor.author | dimoulas, A. | |
dc.date.accessioned | 2021-10-16T03:01:07Z | |
dc.date.available | 2021-10-16T03:01:07Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10800 | |
dc.source | IIOimport | |
dc.title | Molecular beam epitaxy for advanced gate stack materials and processes | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Claes, Martine | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Demand, Marc | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.imecauthor | Houssa, Michel | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.source.peerreview | no | |
dc.source.conference | MRS Spring Meeting Symposium G: Advanced Gate Dielectric Stacks on High-Mobility Semiconductors | |
dc.source.conferencedate | 28/03/2005 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |