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Molecular beam epitaxy for advanced gate stack materials and processes

dc.contributor.authorLocquet, Jean-Pierre
dc.contributor.authorMarchiori, Chiara
dc.contributor.authorSousa, M.
dc.contributor.authorSiegwart, H.
dc.contributor.authorCaimi, D.
dc.contributor.authorFompeyrine, Jean
dc.contributor.authorPantisano, Luigi
dc.contributor.authorClaes, Martine
dc.contributor.authorConard, Thierry
dc.contributor.authorDemand, Marc
dc.contributor.authorDeweerd, Wim
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorHoussa, Michel
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorLujan, Guilherme
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorRohr, Erika
dc.contributor.authorSchram, Tom
dc.contributor.authorHooker, Jacob
dc.contributor.authorRittersma, Chris
dc.contributor.authorFurukawa, Yukiko
dc.contributor.authorSeo, J.W.
dc.contributor.authordimoulas, A.
dc.date.accessioned2021-10-16T03:01:07Z
dc.date.available2021-10-16T03:01:07Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10800
dc.sourceIIOimport
dc.titleMolecular beam epitaxy for advanced gate stack materials and processes
dc.typeOral presentation
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorSchram, Tom
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium G: Advanced Gate Dielectric Stacks on High-Mobility Semiconductors
dc.source.conferencedate28/03/2005
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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