Aggressive scaling of Cu lowk: impact on metrology

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Authors
Maex, Karen; Brongersma, Sywert; Iacopi, Francesca; Vanstreels, Kris; Travaly, Youssef; Baklanov, Mikhaïl; D'Haen, Jan; Beyer, Gerald
Conference
Characterization and Metrology for ULSI Technology
Title
Aggressive scaling of Cu lowk: impact on metrology
Publication type
Proceedings paper
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