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Supercritical CO2 low-k dielectric repair

dc.contributor.authorMalhouitre, Stephane
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorMuscat, Anthony
dc.contributor.authorGranger, Pascal
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-16T03:13:20Z
dc.date.available2021-10-16T03:13:20Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10840
dc.sourceIIOimport
dc.titleSupercritical CO2 low-k dielectric repair
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.source.peerreviewno
dc.source.beginpage301
dc.source.endpage308
dc.source.conferenceCleaning Technology in Semiconductor Devices Manufacturing IX
dc.source.conferencedate16/10/2005
dc.source.conferencelocationLos Angeles, CA USA
imec.availabilityPublished - imec
imec.internalnotesECS Transactions; Vol 1, nr 3


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